JPH036829U - - Google Patents
Info
- Publication number
- JPH036829U JPH036829U JP6704389U JP6704389U JPH036829U JP H036829 U JPH036829 U JP H036829U JP 6704389 U JP6704389 U JP 6704389U JP 6704389 U JP6704389 U JP 6704389U JP H036829 U JPH036829 U JP H036829U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- partition wall
- sample
- chamber
- plasma generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004380 ashing Methods 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 3
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6704389U JPH036829U (en]) | 1989-06-07 | 1989-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6704389U JPH036829U (en]) | 1989-06-07 | 1989-06-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH036829U true JPH036829U (en]) | 1991-01-23 |
Family
ID=31600272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6704389U Pending JPH036829U (en]) | 1989-06-07 | 1989-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH036829U (en]) |
-
1989
- 1989-06-07 JP JP6704389U patent/JPH036829U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH036829U (en]) | ||
| JPH02125330U (en]) | ||
| JPH02127032U (en]) | ||
| USD268784S (en) | Body support for consummating an act of marital union | |
| JPS63165750U (en]) | ||
| JPH0375383U (en]) | ||
| JPH0171439U (en]) | ||
| JPH02127031U (en]) | ||
| USD317353S (en) | Combined bathtub and shower enclosure | |
| JPS62136570U (en]) | ||
| JPH02112397U (en]) | ||
| JPH0333946U (en]) | ||
| JPH0337742U (en]) | ||
| JPS636057U (en]) | ||
| JPH0229149U (en]) | ||
| JPS61149596U (en]) | ||
| JPH0423130U (en]) | ||
| JPH03101848U (en]) | ||
| JPH01155247U (en]) | ||
| JPS62180939U (en]) | ||
| JPS61203544U (en]) | ||
| JPS6318746U (en]) | ||
| JPS59178858U (ja) | イオンビ−ム装置 | |
| JPH0183065U (en]) | ||
| JPH0456332U (en]) |